680 Scanning Auger Nanoprobe - Semiconductor Online

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680 Scanning Auger Nanoprobe Source: Physical Electronics The PHI 680 Scanning Auger Nanoprobe is a high performance Auger system that provides the foremost solution for characterization of complex structures... The PHI 680 Scanning Auger Nanoprobe is a high performance Auger system that provides the foremost solution for characterization of complex structures. The 680's Schottky field emission optics affords a spatial resolution of less than 100Å. Placing the electron column along the axis of the cylindrical mirror analyzer results in simple and reliable analysis of multiple sample types, including samples with rough or irregular surface topography. A computer-controlled, motorized stage permits flexible sample manipulation, including compucentric rotation for Zalar sputter-depth profiles. The advanced, inert-gas ion gun enables efficient low voltage sputtering for superior thin film characterization. Taken as a whole, the PHI 680 provides straight-forward system operation and data interpretation, resulting in enhanced through-put and productivity for materials characterization, problem solving, and failure analysis.

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