Protein Binding Detection Using On-chip Silicon Gratings - PubMed

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Abstract

We demonstrate a silicon gratings-based biosensor to detect functionalized protein binding on its surface. The designed silicon gratings have sensitivities up to 197 nm/RIU in detecting refractive index change and 1.61 nm per nanometer of thickness change of bio-material on the surface of silicon gratings. Functionalizing proteins on gratings surface by eliminating unspecific binding makes this device more selective and efficient. Streptavidin at a concentration of 0.016 μmol/mL was functionalized on silicon substrate and biotin of 12 μmol/mL concentration was used as a target molecule in our detection experiments. Normal transmission measurements of gratings are made in air at different stages of immobilization, bare silicon grating, after attaching streptavidin and after trapping biotin. Total shifts in resonant peak wavelength of ∼15 nm in normal transmission were observed after immobilizing biotin with ∼7 nm of shift in resonant peak wavelength after functionalizing streptavidin to silicon substrate.

Keywords: biosensor; gratings; immobilization; protein; silicon.

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Figures

Figure 1.

Figure 1.

Gratings structure model used in…

Figure 1.

Gratings structure model used in the Lumerical FDTD simulation software.

Figure 1. Gratings structure model used in the Lumerical FDTD simulation software.
Figure 2.

Figure 2.

Simulation results: (a) Shifts in…

Figure 2.

Simulation results: (a) Shifts in resonant peak due to bio-material coatings of different…

Figure 2. Simulation results: (a) Shifts in resonant peak due to bio-material coatings of different thickness on silicon gratings; (b) Shifts in resonant peak wavelengths with respect to thickness of bio-material.
Figure 3.

Figure 3.

SEM image of silicon gratings…

Figure 3.

SEM image of silicon gratings fabricated using e-beam lithography.

Figure 3. SEM image of silicon gratings fabricated using e-beam lithography.
Figure 4.

Figure 4.

Schematic of the immobilization process…

Figure 4.

Schematic of the immobilization process on silicon substrate.

Figure 4. Schematic of the immobilization process on silicon substrate.
Figure 5.

Figure 5.

AFM images of grating surface…

Figure 5.

AFM images of grating surface before and after immobilization.

Figure 5. AFM images of grating surface before and after immobilization.
Figure 6.

Figure 6.

Schematic of measurement setup.

Figure 6.

Schematic of measurement setup.

Figure 6. Schematic of measurement setup.
Figure 7.

Figure 7.

Normal transmission spectra of grating…

Figure 7.

Normal transmission spectra of grating devices with different groove widths.

Figure 7. Normal transmission spectra of grating devices with different groove widths.
Figure 8.

Figure 8.

Measurements recorded on device 1…

Figure 8.

Measurements recorded on device 1 at different stages of immobilization with inset of…

Figure 8. Measurements recorded on device 1 at different stages of immobilization with inset of confocal image of the device after functionalizing with biotin where the streptavidin was tagged with fluorescein.
Figure 9.

Figure 9.

(a) Shifts in resonant peak…

Figure 9.

(a) Shifts in resonant peak due to immobilization on different gratings sensors with…
Figure 9. (a) Shifts in resonant peak due to immobilization on different gratings sensors with respect to thickness of bio-material; (b) Comparison of simulation data with measurement results.
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