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PaperTwo-dimensional fluid simulation of inductively coupled N2/NH3/SiH4 discharge

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Published 19 October 2021 • © 2021 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved. Journal of Physics D: Applied Physics, Volume 55, Number 3Citation Ju-Hong Cha et al 2022 J. Phys. D: Appl. Phys. 55 035203DOI 10.1088/1361-6463/ac2b62

Authors

Ju-Hong Cha

AFFILIATIONS

Department of Electrical Engineering, Pusan National University, Busan, Republic of Korea

https://orcid.org/0000-0001-9722-0664

Kwon-Sang Seo

AFFILIATIONS

Department of Electrical Engineering, Pusan National University, Busan, Republic of Korea

Sang-Woo Kim

AFFILIATIONS

Department of Electrical Engineering, Pusan National University, Busan, Republic of Korea

Ho-Jun Lee

AFFILIATIONS

Department of Electrical Engineering, Pusan National University, Busan, Republic of Korea

EMAIL

[email protected]

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Open scienceAuthors

Ju-Hong Cha

AFFILIATIONS

Department of Electrical Engineering, Pusan National University, Busan, Republic of Korea

https://orcid.org/0000-0001-9722-0664

Kwon-Sang Seo

AFFILIATIONS

Department of Electrical Engineering, Pusan National University, Busan, Republic of Korea

Sang-Woo Kim

AFFILIATIONS

Department of Electrical Engineering, Pusan National University, Busan, Republic of Korea

Ho-Jun Lee

AFFILIATIONS

Department of Electrical Engineering, Pusan National University, Busan, Republic of Korea

EMAIL

[email protected]

Author notes

Author to whom any correspondence should be addressed.

Notes

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