Phi 5600 ESCA System - MEMS Exchange

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MNXPhi 5600 ESCA system

Phi 5600 ESCA system
Alternate Name XPS
Manufacturer Phi
Model 5600
Type commercial
Equipment Characteristics
MOS clean no
Piece dimensionRange of wafer piece dimensions the equipment can accept 0 .. 25 mm
Piece geometryGeometry of wafer pieces the equipment can accept circular, irregular, other, rectangular, triangular shard
Piece thicknessRange of wafer piece thickness the equipment can accept 0 .. 2 mm
Wafer materialsList of wafer materials this tool can accept (not list of all materials, just the wafer itself). alumina, BK7, Borofloat (Schott), ceramic, copper, Corning 1737, Foturan (Schott), fused silica, gallium arsenide, gallium phosphide, germanium, glass (Hoya), glass-ceramic, indium phosphide, lithium niobate, other, Pyrex (Corning 7740), quartz (fused silica), quartz (single crystal), sapphire, silicon, silicon carbide, silicon germanium, silicon on insulator, silicon on sapphire, titanium
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